5.0 InLine Chemical Heaters

5.1  TIH Series, Inline Chemical Heater

The TIH Series in-line fluoropolymer heater is ruggedly designed for the most demanding recirculation or single pass chemical applications and to provide years of trouble-free performance. The heater is typically used in conjunction with a chemical bath or spray system with an external pump/filter. The heater provides high purity heating of chemistry for the semiconductor, FPD, MEMS, biomedical, photovoltaic and other industries.


Service: Inline chemical heater with all fluoropolymer wetted surfaces for virtually any wet chemistry application

Temperature Range: Up to 180ºC chemistry

Maximum Working Pressure: 100 PSI (7 Bar) at 25°C, 60 PSI (4 Bar) at 180ºC

Heater Sizes: 1,000 watts up to 18,000 watts

Heater Voltages Available: 200 to 600 volts, single or three phase (12kW and larger require three phase)

Watt Density: 10 watts per square inch (1.5w/cm2)

Fluid Connections Available:
• ¼-inch (6mm) to 1-inch (25mm) flared
• ½-inch (12mm) to 1-inch (25mm) Super 300 Type Pillar® 
• Other connections available, consult factory

Third Party Certifications: CE, UL, Semi S2 and S3

Element Purge:
• Small amount of clean dry air (CDA) or N2 gas flows between the metal grounded element and the PTFE sheath
• Purge minimizes potential for ionic contamination
• Removes chemical permeation for longer service life
Corzan® is a registered trademark of The Lubrizol Corporation

Standard Features
• .027” (.69mm) PTFE sheathed grounded heating element for long service life
• Patented gas-purged element design
• Rugged, heavy-wall chamber construction
• ¾-inch (19mm) thick
• 10' (3m) FEP sleeved power and control cables
• Process temperature sensors (FEP sheathed 1000 ohm RTD)
• Heater element overtemperature sensors (FEP sheathed 1000 ohm RTD)
• Heater element thermal cutoff device (TCO)

• Horizontally mounted configuration
• Integral cooling coils
• 100 ohm RTDs or “J”, “K”, or “E” type process and element  thermocouples
• Lower watt density heaters for special   applications
• PVDF high temperature mounting brackets
• Capacitive style liquid level verification
• PID temperature control module
• PLC temperature control module with patented Demand Anticipation

    Control (DACTM)
• Element purge flow regulator panel including:
> Back pressure switch
> Flow meter
> Flow regulator

5.2  HOT SHOT — Inline Ultra Pure Quartz Chemical Heaters

The H2OT SHOT™ Quartz Chemical Heater is constructed with all ultra pure quartz wetted parts. An excellent choice for SC1, SC2, and other quartz compatible applications, HOT SHOT is designed for use in processes up to 180°C (356°F). Exceptionally easy maintenance and several plumbing configurations are available for maximum flexibility. Third party certified to SEMI and UL standards, and CE compliant. Sizes available up to 12kW.


Heater: Patented heating system using infrared elements
Sizes: 750 watts to 12,000 watts

Voltages: 208 volt to 480 volt, single or three phase Consult factory for specific wattage/voltage combinations available
Temperature Limit: 185° C, depending on operating conditions

Temperature Accuracy: 1° C, depending on operating conditions
Flow Rate: Up to 100 lpm

Pressure Rating: 50 PSIG working
MTBF: In excess of 20,000 hours

MTTR: 10 minutes (with adequate access)
Heating Element: IR halogen lamps

Wetted Surfaces: 100% GE type 214 quartz
Inlet/Outlet: 3/4" MNPT flare quartz connections

Purge Gas: Patented system using 3.5 SCFM (min.) clean dry air (CDA) or nitrogen (N,), 1/4" O.D. tube connector

Standard Safety Features (requires controller interface):
• Heater housing over-temperature shutoff and alarm ("J" type thermocouple and redundant bi-metallic snap switch)
• Purge gas verification and interlock

Housing: 100% PTFE with Viton o-ring seals (non-wetted). Conforms to FM material standards
Dimensions: 10" W (254mm) x 19" L (485mm) x 7.8" H (198mm)

ETL certified to UL 499 standards CE compliant
• Conforms to Semi S2 and S3 standards

• Several plumbing configurations available, consult factory.
• Solution leak detection - capacitive-style leak detector.
• Solution temperature sensor subassembly: fluoropolymer sheathed “J” type thermocouple in a flared “T”

• Temperature regulating system with:
> Distributive zero-crossing SSR powered by open looped PID control (consult factory for details)
> Available: RS 232, RS 485, 4-20mA, or 0-10V interface
> Liquid over-temperature shutoff and alarm

5.3  SHB and SHC Series are electric inline heaters designed to safely heat process chemistries through indirect contact instead of direct immersion. These heaters deliver superior temperature stability with changes in flow, and offer multiple temperature sensors to ensure safe operation.
For higher wattage applications, the FrontierTM Series electropolished stainless steel inline fluid heater is the optimal choice for solvents and IPA.

  • Service: Inline electropolished stainless steel or fluoropolymer heater for heating chemistries, single pass or recirculating.
  • Construction: 316 electropolished stainless steel or PTFE wetted surfaces, fluid pathway through a stainless steel tube embedded in aluminum heating block.
  • Fluid Connections: 1/8” (3mm), 1/4” (6mm), 3/8” (9mm) or 1/2” (12mm); custom connections available.
  • Temperature Range: Up to 180°C (356°F)
  • Pressure Range: Up to 200 PSIG (1379 kPa)
  • Heater Voltages Available: 120-480V, single phase
  • Certifications: CE, ETL (tested to UL 823, UL 499 and CSA C22.2).  Rated for Class I, Division 2 hazardous locations.
  • Wattage: 250-2000 (varies per product line)

Saftey Features

• Grounded metal construction
• Positive temperature coefficient (PTC) heating elements
• Multiple element thermocouples or RTDs
• Insulated housing
• Hermetically sealed high limit thermal cutoff device (TCO)
• Dual containment plumbing available as an option

Dual containment plumbing available
5.4  Inline Solvent Heaters - Frontier™ Series by Process Technology
Process Technology Introduces New High Wattage Inline Heater
Process Technology, a wet process heating and cooling equipment manufacturer, introduces its new Frontier™ Series electropolished stainless steel inline fluid heater for high purity solvent heating applications.

Based on the increasing market demand for high flow and low pressure drop applications, Process Technology developed its next generation Frontier heater to meet broader and emerging customer requirements.  Research and development efforts focused on using thermo/hydrodynamic computer modeling to optimize the patented design.  Enhanced features include a non-casted structure, versatile flow rates, an expanded wattage range, and high-quality electropolished surfaces resulting in superior cleanliness.

The Frontier can be used in single pass or recirculating applications for safely heating chemistries such as: EKC265, EKC8730, EKC270, ST28, ST26, ACT690C, MEK, NMP and IPA.  Its construction consists of electropolished 316L stainless steel, PFA and PTFE wetted surfaces, and a fluid pathway through a patented circular tubing array.  Fluid connections available include ½-inch (12mm), ¾-inch (19mm), 1-inch (25mm) tube stubs (or custom connections) and can accommodate flow rates up to 75 lpm at a pressure drop less than 5 psi.  The heater’s temperature range is up to 180°C (356°F), and pressure range is up to 100 PSIG (689 kPa).  Available heater voltages include 120-600V, single or three phase, and standard wattages are 3, 6, 9, 12, 18, 24, and 36 kW.

The Frontier’s safety features include grounded metal construction, multiple element thermocouples, insulated housing, and a hermetically sealed high limit thermal cutoff device (TCO). It is certified to UL 823, UL 499, CSA 22.2, and CE; rated for Class I, Division 2 hazardous locations.

According to Joel Rozga, Director of Engineering for Process Technology, “The innovative new Frontier inline solvent heater heats many process solvents through indirect contact instead of direct immersion.  The Frontier delivers exceptional temperature stability/performance over a wide range of flow and temperature requirements with unparalleled safety.”

Process Technology, established in 1978, serves industries that include Semiconductor, FPD, MEMS, Nanotechnology, Photovoltaic (solar cell), LCD, Biomedical and Pharmaceutical.  Process Technology’s product offering includes LUFRAN™ fluoropolymer DI water heaters, quartz DI water heaters, fluoropolymer & quartz inline chemical heaters, electric immersion heaters, heat exchangers, high temperature filter chambers, solvent heaters, and nitrogen heaters. Semi S2/S3 and CE compliant; ETL/UL and NRTL certified.  The company is certified to ISO 9001:2008, including design.


Service: Inline stainless steel heater for heating solvents, single pass or recirculating.

Construction: Electropolished 316L stainless steel, PFA and PTFE wetted surfaces, fluid pathway through manifolded tubing oriented in a circular array.

Fluid Connections: ½-inch (12mm), ¾-inch (19mm) or 1-inch (25mm) tube stubs (custom connections available).

Temperature Range: Up to 180°C (356°F)

Pressure Range: Up to 100 PSIG (689 kPa)

Available Heater Voltages: 120-600V, single or three phase

Standard Wattages: 3, 6, 9, 12, 18, 24, 36 kW

Pending Certifications: UL 823, UL 499, CSA 22.2, & CE. Rated for Class I, division 2 hazardous locations

Standard Features - In lieu of direct immersion, FrontierTM inline solvent heaters safely heat process solvents through indirect contact. Standard features include:
• Grounded metal construction
• Redundant element thermocouples
• Insulated housing
• Hermetically sealed high limit thermal cutoff device (TCO)

5.6 Frontier Ultra Inline Chemical/Solvent Heater - New!!!

Next Generation High-Purity Heater, Frontier Ultra!

Product Description

PFA and PTFE-wetted surfaces provide a higher level of purity for metal-free solvent heating.


•  Frontier Ultra is a high-wattage, high-flow inline chemical/solvent heater for use in a variety of applications and industries.

•  No wetted o-rings maintain an ultra clean heating process.

•  Offers outstanding performance over a wide range of flow and temperature requirements.

•  Safely heat process chemistries, including IPA

•  Certification: UL499, Semi S2 and CE certified (pending).


Construction: PFA and PTFE wetted surfaces, fluid pathway through manifold tubing oriented in a patented circular array.

Standard Wattages: 2kW up to 24kW.

Voltages: 200 to 480 volts, single or three phase (12kW and larger require three phase)

Temperature Range: Up to 180°C (356°F) (Consult factory for watt density requirements).

Fluid Connections: ½-inch (12mm), ¾-inch (19mm), or 1-inch (25mm) flared connections (custom connections available).

Options Available (consult factory)

Custom configurations, connections and cable lengths