7.0 Process Modules

7.1 Static Constant Temperature Bath

Our STATIC CONSTANT TEMPERATURE BATHS are available in a wide variety of configurations. They are engineered to reliably and efficiently heat HF, H2S04/H202, acetic acid etc. or Operating temperatures range from sub-ambient to 185 degrees
Celsius.


Standard features:  

  • Teflon immersion heater with integral overtemperature thermocouple.
  • J-Type Process thermocouple (if Process Controller is ordered)
  • Liquid level sensor (if Process Controller is ordered)
  • Teflon process tank
  • Refluxor (condensing head) with cooling coils and hinged cover.
  • Process Controller with integral timer

Specifications:
Capacity:

  • Two ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassettes
  • One ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassette
Options:
  • Halar tank
  • Custom size (interior dimensions, size and number of cassettes).
  • Drain valve or drain adapter (connection)
  • Magnetic Stirrer, N2 Bubbler
  • Custom Covers (lift off, pass-thrus for etch stop connections), Refluxors
  • Voltage, phase.
  • Custom Process Controllers with / without timers
  • DI Make up system
Shown above - single 4" capacity, refluxor (condensor) and lift off cover
Shown above -  dual 6" capacity with refulxor and cover
Shown above - Bath with HXOL Style Heater (picture provided by those swell guys @ Modutek)
7.2 Now available from ISE is sales and support of the Lufran / Process Technology LTFE - High
Temperature Filter Etch Bath.
 ISE has distributed, installed and serviced Lufran LTFE High Temperature Filter Etch Bath's since 1993


The Lufran LTFE High Temperature Filter Etch Bath was designed for use H3P04, SC1, SC2, KOH etc. to 180 Celsius and features:

  • 2 ea. 4, 5 or 6" or single 8" wafer cassette capacity
  • 360 degree, PFA Teflon overflow weir w/ leveling feature.
  • Inner Molded PFA Teflon Tank.
  • PTFE Teflon Heater with patented (patent numbers 4,553-024-4,158 764) N2 purge feature.
  • 208 VAC, single phase.
  • 4.5 kW Teflon Immersion Heater.
  • 2 ea. J-type over-temperature thermocouple, thermal cutoff switch
  • 1 ea. Teflon process thermocouple i) Liquid level sensor
  • All Teflon pump with 1⁄2 hp water cooled motor k) All Teflon Filter Housing (filter not included, optional see below)
  • Flow enclosure with Heater purge controls, bubble sensor, motor cooling and purge controls.

Process Control Package

  • Digital Self tuning, microprocessor based PID Temperature Controller. Membrane control panel, LED readout
  • Separate 208VAC Power Module
  • Integral Process Timer
  • Audio and visual alarms
  • Access code.
  • Nitrogen purge regulator and flow meter

Available components/services include but are not limited to:
  • Process Controllers and Power Supplies
  • LTFE Teflon Process Heaters
  • Process Thermocouples
  • Quartz or Teflon Weir
  • Water Cooled Motor (SM-3) Rebuild
  • LT1-3 Teflon Impeller
  • Flow Panel
  • Teflon Condensing Ring
  • Filter cap, Impeller removal tools
  • Various sub-components (fittings, tubing, manifolds etc. )
  • SM-3 Water Cooled Motor

Now available for quick delivery!      Model LTFE-6002-S/P Dual 6” capacity LTFE Teflon
Filter Etch Bath (for H2S04, H3P04 etc.)

7.3  Filter Etch Bath (PB-f)  The ISE Filter Etch Bath is engineered to offer filtration and temperature control of virtually any chemistry from 10 to 90 degrees Celsius. +/- 1 degree C*.  

The Filter Etch Bath is ideally suited for HF, resist develop and similiar applications and will substantially increase the useful life of the chemistry.   Standard and Optional features are noted below.

*Under certain conditions +/- 0.2ºC is attainable


Process Module Features:

  • Natural Polypropylene,  Halar Construction
  • Serrated Overflow 360º inner tank (weir)        
  • Clear PVC, drop down Cover        
  • Heat exchange coil        
  • Revolutionary Flow Linearization (patent  pending) Speed Controlled, water cooled pump /Motor (1/2 hp)
  • Pre-programmed ramp to prevent de-wetting of filters
  • Manual Speed control
  • Standard 10 inch 220 filter housing (filter not  included)
  • Full One (1) Year Warranty
  • Pneumatic drain valve(s)

Capacity - Models are available to process from 1 ea. 4”, 5”, 6”, 8” or 2 ea. 4”, 5”, 6” or 8” wafer cassettes

Options:


  • Temperature Timer Process Controller
  • Temperature Controls Circulator
  • Teflon UL listed Immersion Heater
7.4  Our Quartz Static Constant Temperature Bath is engineered to heat virtually any chemistry (except HF, KOH and similar chemistries) up to 180 degrees Celsius.
+/- 1 degree C.  Included with each bath is a process controller (can be deleted
for a reduction in price) and a host of safety features as noted below.

Standard Features

Module

  • Flame Polished Quartz Vessel
  • Flame Retardant Polypropylene Outer Enclosure (housing)
  • High Efficiency, 5-Sided, 208v Heater (kW dependant on size ordered)
  • Separate Internal, J' Type Thermocouple, 15 ft.
  • Dual Safety Snap Switches
  • Power Cord Harness, 15 ft.
  • Alumina Silica Insulation (eliminates flame space)

Safety Features
  • Teflon Process Thermocouple (enables high temp setting)
  • Separate Internal J type overtemperature Thermocouple
  • Dual Safety Snap Switches

Specifications:
Capacity:

  • two ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassettes
  • one ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassette

Options include:
  • Process applications include SC1, SC2, Wafer Clean, Strip, Nitride Etch,
  • Interior dimensions, wafer cassette capacity (size and number of
  • cassettes).
  • Drain valve or drain adapter.
  • Magnetic Stirrer, N2 Bubblers.
  • Covers (Hinged  - lift off), Refluxors.
  • Voltage, phase.
  • PID Process Controllers with / without integral Timers.
7.5  Our Stainless Steel Static Constant Temperature Bath is engineered to heat solvent based process chemistries.  Included with each bath is a process controller (can be deleted for a reduction in price) and a host of safety features as noted below.

Standard Features

Module

  • 316 Electropolished Stainless Steel Vessel
  • Tank designed to meet freeboard ratio
  • Flame Retardant Polypropylene Outer Enclosure (housing)
  • High Efficiency, 5-Sided, 208v Heater (kW dependant on size ordered)
  • Separate Internal, J' Type Thermocouple, 15 ft.
  • Dual Safety Snap Switches
  • Power Cord Harness, 15 ft.
Safety Features
  • Teflon Process Thermocouple (enables high temp setting)
  • Separate Internal J type overtemperature Thermocouple
  • Dual Safety Snap Switches
Specifications:

Capacity:

  • two ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassettes
  • one ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassette

Options include:
  • Interior dimensions, wafer cassette capacity (size and number of cassettes).
  • Drain valve or drain adapter.
  • Magnetic Stirrer, N2 Bubblers.
  • Covers (Hinged  - lift off), Refluxors.
  • Voltage, phase.
  • PID Process Controllers with / without integral Timers.

7.6 DR Series Quick Dump Rinser, Designed specifically for MEMS processes. It features a programmable cascade feature and misting spray nozzles to effectively rinse fragile MEMS devices.  MCDR-M Series.  Options include PP or PVDF construction, Rinse to Resistivity System and N2 bubbler.

The DR Series Quick Dump Rinsers and Cascades are available in a wide variety of configurations.  They are engineered to improve the quality and effectiveness of your rinse process.

Standard features:  

  • 2 ea. spray bars, 2 ea. DI water valves
  • 1 or 2 ea. dump valves (dependent on size ordered)
  • Drop away cover
Specifications:
Capacity:

  • Two ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassettes
  • One ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassette
Material of construction:  Polypropylene or PVDF (dependent on model ordered)

Options include:
  • Material of construction  - Wetted materials include Teflon, PVDF, and polypropylene etc.
  • Process applications include cold and hot DI rinse
  • Interior dimensions, wafer cassette capacity (size and number of cassettes)
  • Single or reclaim double door (applies to Quick Dump Rinsers only)
  • Multiple rinse stages / wells (applies to Cascades only)
  • N2 Bubbler
  • Covers (Hinged  - lift off)
  • Voltage, phase
  • Controller