THE PROCESS TECHNOLOGY TIH SERIES IN-LINE FLUOROPOLYMER HEATER is engineered to give many
years of trouble free performance for the most demanding recirculation or single pass chemical applications. Typically it is
used in conjunction with a chemical bath or spray system and external pump/filter:
Applications include but are not limited to:
- Processes - SC1, SC2, BOE, Nitride Etch, KOH etch etc.
- Chemistries - ammonium hydroxide (NH5O), hydrogen peroxide (H3O3)*, hydrochloric acid (HCl),
- hydrofluoric acid (HF) ammonium fluoride (NH4F), ozone (03) phosphoric acid (H3PO4), sulfuric acid (H2S04) etc.
* Purged element option not needed for these chemistries)
Specifications:
- Heater Sizes: 1 kW to 13.5 kW, 120 to 600 volts, 1 or 3 phase (10 kW and up require 3 phase)
- Temperature Range: 180° C, depending on chemistry
- Certifications: CE, UL and Semi S2
- Maximum Pressure to 100 PSI at ambient temperature, 35 PSI at 180º C
Standard Features:
- 030" (.76mm) PTFE sheathed metal heating element for long service life
- Patented "purge gas" element design
- 30 to 45 minute heat up (typical)
- Customized plumbing connections (1/2” to 1 inch Flaretec®, Super PillarTM, Super PillarTM)
- Rugged, heavy wall construction
Safety Features:
- Fully grounded, fluoropolymer sheathed metal element
- Capacitive style liquid level verification
- Process temperature control (PTFE sheathed "J" type thermocouple standard)
- Heater element over-temperature alarm (PTFE sheathed "E" type thermocouple standard)
- Heater purge pressure monitor and alarm (part of optional control package)
Options: (Process Controllers)
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Process
Technology
TIH Teflon
Heater
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The PROCESS TECHNOLOGY H2OT SHOT QUARTZ ULTRAPURE CHEMICAL HEATER The Process
Technology quartz IR heater utilizes only high-purity quartz wetted surfaces to ensure no process contamination. IR heating
lamps provide responsive heating.
Application: With an all-quartz construction, a wide range of SC1 and SC2 fluids can be heated including hydrochloric-peroxide,
ammonium-peroxide,
sulfuric-peroxide, phosphoric acid, sulfuric acid and ultrapure deionized water. A sealed, all fluoropolymer (PTFE) containment
housing provides a
corrosion-proof, maintenance-free installation and secondary containment. The housing vent connection permits excess heat to
be directed out of the wet bench.
Specifications:
- Heater Sizes: 0.75 kW to 12 kW, 208 volt to 480 volt, single or three phase
- Temperature Range: 185° C, depending on operating conditions
- Certifications: ETL certified to UL 499 standards, CE compliant, Conforms to Semi S2 and S3 standards
- Pressure rating: 50 PSIG working
- Wetted surfaces: 100% GE type 214 quartz
Safe Features: Over temperature protection, GFP, SEMI S2 safety guidelines and optional leak detection ensures efficient, safe
heater operation.
Combine all of these features in a package occupying less than a 12 inch by 12 inch by 24 inch cube, and you have the ideal
heater for your wet process tool or
other point-of-use ultrapure heater application.
FEATURES and BENEFITS:
- MTBF 9000 hours, MTTR, 10 minutes (with adequate access)
- Outstanding Cleanliness: Ultra-clean performance is achieved through the use of 100% high-purity quartz construction. No
ionic or bacterial contamination.
- Reliable: Our patented cooling system significantly extends heater element life versus conventional designs. With cooling
air directed only where it is needed
(the lamp sockets), the heater uses minimal purge gas and heater efficiencies are maximized.
- Low Cost of Ownership (COO): Heating element can be field replaced without disturbing the plumbing connections or
affecting the integrity of the chemistry,
resulting in significantly lower costs over the life of the heater and the chemicals.
- Excellent Responsiveness: Halogen lamps provide instantaneous start-up and rapid response with excellent temperature
stability under varying flow rates.
- Low Pressure Drop: Unique construction has minimal pressure drop for high-circulation applications.
- Easy Maintenance with Minimal Down Time: Plug-in heater element is easily replaced in minutes. Fluid connections
remain intact, eliminating the need for
system re-qualification.
- "Safe Process" Design: The heating element is isolated from the process to virtually eliminate the potential for
catastrophic process contamination.
- Secondary Containment: The PTFE housing acts as a maintenance-free secondary containment vessel to help protect the
environment from chemical spills.
- Leak detection available as an option.
- Compact Size: Space-conscious design minimizes footprint requirements.
- No Dead Zones: Tangential flow pattern eliminates stagnant zones in the heater. The heater is self-draining and self-
venting (upon proper installation).
- No O-Rings: process contamination associated with o-rings is eliminated. Leak-free operation assured.
Options
- Plumbing configuration
- Solution leak detection
- Solution temperature sensor subassembly
- Temperature regulating system
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Process Technology Hot Shot IR Heater
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The PROCESS TECHNOLOGY SOLTAN2TM INLINE SOLVENT /NITROGEN HEATER Electric heater with
stainless steel construction is designed for safe heating of NMP, EKC 265, EKC 830, ACT 690, ACT 970 and other solvents.
Also heats nitrogen or other inert gases up to 200°C (392°F)
APPLICATIONS:
Solvent heating, including:
- EKC265
- EKC270
- EKC8730
- ACT690C
- ST28
- ST26
- MEK
- NMP
Gas heating, including:
- N2 (nitrogen gas)
- N2 percolation
- CDA (clean dry air)
- Other nonflammable gases
SPECIFICATIONS:
- Service: Inline stainless steel heater for heating solvents or gases, single pass or recirculating.
- Construction: 316 stainless steel wetted surfaces, fluid pathway through a stainless steel tube embedded in cast aluminum heating
block; explosion resistant cast aluminum electrical enclosure.
- Fluid Connections: ½-inch (12mm) or ¾-inch (19mm) tube stubs (custom connections available)
- Temperature Range: -195°C (-320°F) to 200°C (392°F)
- Pressure Range: 0 PSIA to 400 PSIG (0 to 2859 kPa)
- Heater Voltages Available: 120-600V, single or three phase
- Wattage: 2, 3, 4, 6, and 9 kW
- Certifications: CE, ETL (tested to UL 823, UL 499 and CSA C22.2). Rated for Class I, Division 2 hazardous locations.
SAFETY FEATURES:
- Grounded metal construction
- Dual element thermocouples
- Insulated housing
- Explosion resistant electrical enclosure
- Replaceable, hermetically sealed high limit thermal cutoff device (TCO)
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Process Technology Soltan Solvent Heater
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