PROCESS TECHNOLOGY ETCH TECHTM SERIES CASCADE PROCESS BATHS Non-
breakable PFA tank. For use with integral in-tank heater or external inline heater.
Applications Include:
- Nitride etch/strip: Phosphoric Acid (H3PO4) and water (H2O)
- Sulfuric (H2SO4) process
- Hydrofluoric (HF) process • Buffered oxide etch (BOE) process (hydrofluoric and ammonium fluoride)
- Hydrochloric (HCL) process • SC1 (ammonium hydroxide and hydrogen peroxide)
- SC2 (hydrochloric and hydrogen peroxide)
Specifications:
Tank Sizes:
- Two 4", 5", 6", 8" (100, 125, 150, 200 mm) cassettes
- One 8" (200mm) cassette
Temperature range: Up to 180º C dependent on chemistry.
Construction:
- Unbreakable PFA inner and outer tanks.
- Inner tank sparger rails provides even chemical dispersion and false bottom on which carriers are set.
- Inner tank walls have serrated edges to prevent whirlpools.
- The fluoropolymer mid-frame assembly is suspended from the top deck for easy leveling of the process tank. This
ensures uniform cascading of the chemistry.
- Outer PFA weir for enhanced chemical and heat distribution.
- HalarÒ coated stainless steel outer structure for strength and rigidity.
- PTFE top deck assembly for added structural support.
- Air diverter located in the outer weir to prevent the formation of air pockets around the heater.
Standard features:
- Process thermocouple port • Outer weir thermocouple port • Liquid level port for N2 bubble sensor
- System overflow connection • Drain connection • Process tank leveling adjustments
- Flaretek® inlet connections for remote pump
Heater voltages available: 120 to 600 volts, single or three phase.
Options:
- Tank system can be integrated with existing control systems • PID or PLC Process Controller
- Integral fluoropolymer immersion heater and/or in-line heater (fluoropolymer or quartz available).
- Chemical dispensing manifold • Custom interfacing to match existing system.
- Manual, pneumatic or hydraulic operated lid • In-line filter chamber • PTFE condensing coil.
- Custom fitting of tank to match existing system
- Additional ports for level sensing and automatic chemical fill
- Wafer locater nest.
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Shown Etch Tech, 1 ea. 8" cassette capacity
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Our Low temperature Polypropylene and PVDF Filter Etch Baths (FEB) are engineered to reliably and
efficiently provide sub-micron filtration of various chemistries (BOE, HF etc.). Reduce particle counts, improve
yields and get a return of investment of just months. Operating temperatures range from sub-ambient to 110
degrees Celsius. The FEB will reduce particle counts, improve process yields and gives a return of investment
of just months!
Specifications:
Capacity: 1 ea. 4" to 2 ea. 8" cassettes.
Standard Features
- 1/8, 1/3 or 1/2 HP pump, dependent on model
- N2 purged pump motor
- Adjustable weir gate
- Temperature control provided with PTFE Teflon® or with Temperature Control Circulator.
- Liquid level sensor (process dependant).
Temperature range up to 110°C dependent on chemistry, concentration, etc.
Options
- Heater size or Temperature Control Circulators
- Capacity (number of cassettes or interior process tank dimensions)
- Material of construction (Halar, Stainless steel etc.)
- Auto lids
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Shown - Polypropylene FEB 1 ea. 6" cassette capacity
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Our Polymer Static Constant Temperature Baths are available in a wide variety of configurations. They are
engineered to reliably and efficiently heat various chemistries. Operating temperatures range from sub-
ambient to 185 degrees Celsius.
Standard features:
- Heater w/ overtemperature thermocouple
- Process thermocouple
- Process tank
Specifications:
Capacity:
- two ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassettes
- one ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassette
Options include:
- Material of construction - Wetted materials include Teflon, PVDF, polypropylene, etc.
- Process applications include SC1, SC2, Wafer Clean, Strip, Nitride Etch, Metal Etch, KOH etch etc.
- Interior dimensions, wafer cassette capacity (size and number of cassettes).
- Drain valve or drain adapter.
- Magnetic Stirrer, N2 Bubblers.
- Covers (Hinged - lift off), Refluxors.
- Voltage, phase.
- PID Process Controllers with / without integral Timers.
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Shown: Teflon process bath
with Process Controller refulxor
and cover, 1 ea. 6" cassette
capacity
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Our Quartz Static Constant Temperature Bath is engineered to heat virtually any
chemistry (except HF, KOH and similar chemistries) up to 180 degrees Celsius.
+/- 1 degree C. Included with each bath is a process controller (can be deleted
for a reduction in price) and a host of safety features as noted below.
Standard Features
Module
- Flame Polished Quartz Vessel
- Flame Retardant Polypropylene Outer Enclosure (housing)
- High Efficiency, 5-Sided, 208v Heater (kW dependant on size ordered)
- Separate Internal, J' Type Thermocouple, 15 ft.
- Dual Safety Snap Switches
- Power Cord Harness, 15 ft.
- Alumina Silica Insulation (eliminates flame space)
Safety Features
- Teflon Process Thermocouple (enables high temp setting)
- Separate Internal J type overtemperature Thermocouple
- Dual Safety Snap Switches
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Specifications:
Capacity:
- two ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassettes
- one ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassette
Options include:
- Process applications include SC1, SC2, Wafer Clean, Strip, Nitride Etch,
- Interior dimensions, wafer cassette capacity (size and number of
cassettes).
- Drain valve or drain adapter.
- Magnetic Stirrer, N2 Bubblers.
- Covers (Hinged - lift off), Refluxors.
- Voltage, phase.
- PID Process Controllers with / without integral Timers.
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Shown: Quartz process bath with Process Controller
refulxor and cover, 1 ea. 6" cassette capacity
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Our Quick Dump Rinsers and Cascades are available in a wide variety of configurations. They are
engineered to improve the quality and effectiveness of your rinse process.
Standard features:
- 2 ea. spray bars
- 2 ea. DI water valves
- 1 or 2 ea. dump valves (dependent on size ordered)
- Drop away cover
Specifications:
Capacity
- two ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassettes
- one ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassette
Material of construction: Polypropylene of PVDF (dependent on model ordered)
Options include:
- Material of construction - Wetted materials include Teflon, PVDF, and polypropylene etc.
- Process applications include cold and hot DI rinse
- Interior dimensions, wafer cassette capacity (size and number of cassettes)
- Single or reclaim double door (applies to Quick Dump Rinsers only)
- Multiple rinse stages / wells (applies to Cascades only)
- N2 Bubbler
- Covers (Hinged - lift off)
- Voltage, phase
- PID QDR Controller
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Shown: Polypropylene with
QDR Controller, drop down
cover, 2 ea. 6" cassette capacity
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Our Stainless Steel Static Constant Temperature Bath is engineered to heat solvent based process
chemistries. Included with each bath is a process controller (can be deleted for a reduction in price) and a
host of safety features as noted below.
Standard Features
Module
- 316 Electropolished Stainless Steel Vessel
- Tank designed to meet freeboard ratio
- Flame Retardant Polypropylene Outer Enclosure (housing)
- High Efficiency, 5-Sided, 208v Heater (kW dependant on size ordered)
- Separate Internal, J' Type Thermocouple, 15 ft.
- Dual Safety Snap Switches
- Power Cord Harness, 15 ft.
Safety Features
- Teflon Process Thermocouple (enables high temp setting)
- Separate Internal J type overtemperature Thermocouple
- Dual Safety Snap Switches
Specifications:
Capacity:
- two ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassettes
- one ea. 4", 5, 6, 8 (100, 125, 150. 200 mm) cassette
Options include:
- Interior dimensions, wafer cassette capacity (size and number of cassettes).
- Drain valve or drain adapter.
- Magnetic Stirrer, N2 Bubblers.
- Covers (Hinged - lift off), Refluxors.
- Voltage, phase.
- PID Process Controllers with / without integral Timers.
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